Micromachined Premixed Excimer Laser Gases： Brand Equipment Model Wavelength Excimer Laser Gases ATL ATL ARF-1 193 nm F2,Ar,Xe,Ne ATL KRF-1 248 nm F2,Kr,Xe,Ne TUI CTFTS-ARFV 2.2 193 nm F2,Ar,He,Ne CTFTS-KRFV 2.1 248 nm F2,Kr,He,Ne CTFTS-KRFV 2.2 248 nm F2,Kr,He,Xe,Ne CTMD-ARFV 2.0 193 nm F2,Ar,He,O2,Ne CTMD-XECLV 2.1 308 nm HCl,H2,Xe,Ne CTMN-ARFV 2.0 193 nm F2,Ar,He,Ne CTMN-ARFV 2.1 193 nm F2,Ar,He,Ne CTMN-KRFV 1.0 248 nm F2,Kr,He,Ne CTMN-KRFV 2.0 248 nm F2,Kr,He,Ne CTMN-XECLV 2.0 308 nm HCl,H2,Xe,Ne CTMN-XECLV 5.0 308 nm HCl,H2,Xe,Ne CTMN-XEFV 1.1 450nm~520nm F2,Xe,He,Ne CTMN-XEFV 1.2 450nm~520nm F2,Xe,He,Ne GAM Laser EX5 ArF 193 nm F2,Ar,He,O2,Ne EX5 KrF 248 nm F2,Kr,He,Ne EX5…
