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Halocarbon 14 – Tetrafluoromethane CF4

Product Name: Halocarbon 14 – Tetrafluoromethane CF4 Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT) Filling Content: 30kg/cyl Items Specifications CF4 99.9% 99.999% O2 ≤100 ppmv ≤1.0 ppmv N2 ≤400 ppmv ≤4.0 ppmv CO2 ≤80 ppmv ≤0.5 ppmv CO ≤50 ppmv ≤0.5 ppmv CH4 ≤50 ppmv ≤0.5 ppmv Other Halocarbons ≤100 ppmv ≤2.0 ppmv H2O ≤10   ppmv ≤2.0   ppmv SF6 ≤15 ppmv ≤1.0 ppmv Acidity as HF ≤1.0ppmv ≤0.1ppmv Transportation DOT Shipping Name Tetrafluoromethane, Compressed DOT Classification 2.2 DOT Label Nonflammable Gas UN Number UN1982 CAS No. 75-73-0 CGA/DISS/JIS 320/716/W22-14L Shipped as Compressed Gas Technical Information Cylinder State @ 21.1°C Gas…

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Description

Product Name: Halocarbon 14 – Tetrafluoromethane CF4
Packing: 40L, 44L, 47L, 50L cylinder (GB, ISO, DOT)
Filling Content: 30kg/cyl
Items Specifications
CF4 99.9% 99.999%
O2 ≤100 ppmv ≤1.0 ppmv
N2 ≤400 ppmv ≤4.0 ppmv
CO2 ≤80 ppmv ≤0.5 ppmv
CO ≤50 ppmv ≤0.5 ppmv
CH4 ≤50 ppmv ≤0.5 ppmv
Other Halocarbons ≤100 ppmv ≤2.0 ppmv
H2O ≤10   ppmv ≤2.0   ppmv
SF6 ≤15 ppmv ≤1.0 ppmv
Acidity as HF ≤1.0ppmv ≤0.1ppmv
Transportation
DOT Shipping Name Tetrafluoromethane, Compressed
DOT Classification 2.2
DOT Label Nonflammable Gas
UN Number UN1982
CAS No. 75-73-0
CGA/DISS/JIS 320/716/W22-14L
Shipped as Compressed Gas
Technical Information
Cylinder State @ 21.1°C Gas
Flammable Limits In Air non-flammable
Auto Ignition Temperature (°C ) –
Molecular Weight (g/mol) 88.01
Specific gravity (air =1) 3.04
Critical Temperature ( °C ) -45.65
Critical Pressure ( psig ) 528.459
Applications
One of the largest comsuption kinds of plasma etching gases in microelectronics industry  , also widely used in surface cleaning of electronic device , manufacture of solar cell, laser technology , gas phase insulation , subzero refrigeration , leakage inspection agent and decontaminant of manufacture of printed circuit.

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